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Advanced Coatings for Large-Area or High-Volume Products

The International Conference on Coatings on Glass and Plastics

June 12-16, 2016 Conference Center Braunschweig Germany

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SENTECH Instruments GmbH


SENTECH Instruments develops, manufactures, and globally sells innovative capital equipment centered on thin films in semiconductor technology, microsystems, photovoltaics, nanotechnology and materials research. SENTECH is expert in structuring and deposition of thin films by means of plasma process technology. SENTECH offers systems for plasma etching, plasma enhanced chemical vapour deposition, and atomic layer deposition. SENTECH provides innovative solutions for non-contact, non-invasive optical characterization using ellipsometry and reflectometry. Founded in 1990, SENTECH is a reliable partner to industry and scientific institutions with leading edge equipment, global sales and service network.

SENTECH motto “Erfolg durch Leistung” is a continuing commitment of all employees to achieve success by high standard of efficiency and customer service.

Plasma process technology

  • Inductively Coupled Plasma (ICP) etch of silicon, quartz, and dielectrics
  • Plasma Etch using Capacitively Coupled Plasma (CCP) sources
  • Deep Reactive Ion Etching (DRIE)
  • Inductively Coupled Plasma Enhanced Chemical Vapour Deposition (ICPECVD)
  • Thermal and Plasma Enhanced Atomic Layer Deposition (PEALD)

Thin Film Metrology

  • Spectroscopic ellipsometry
  • Laser ellipsometry
  • Reflectometry
  • Measurement tools for Photovoltaics

SENTECH Instruments GmbH (Booth B1) Schwarzschildstraße 2 12489 Berlin Germany www.sentech.de

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Last modified on:
2016-05-18 14:50:08 CEST
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